Aalborg GFM Manuel d'utilisateur

Technical Data Sheet No. TD9411M Rev. L Date of Issue: April 2013OPERATING MANUALGFM MASS FLOW METERS

4. SPECIFICATIONSFLOW MEDIUM: Please note that GFM17/37/47/57/67/77 Mass Flow Meters are designed towork with clean gases only. Never try to meter or

7Power input is protected by a 750 mA (GFM models with serial numbers below 340621-1)or 300 mA (GFM models with serial numbers above 340621-1) M (medi

8TABLE II GFM 37 MEDIUM FLOW MASS FLOW METER*TABLE III GFM 47 HIGH FLOW MASS FLOW METER** Flow rates are stated for Nitrogen at STP conditions [i.e. 7

95. OPERATING INSTRUCTIONS5.1 Preparation and Warm UpIt is assumed that the Mass Flow Meter has been correctly installed and thor-oughly leak tested a

5.3 Swamping ConditionIf a flow of more than 10% above the maximum flow rate of the Mass Flow Meteris taking place, a condition known as “swamping” ma

116.2.2 GFM 17 modelsUnscrew the inlet compression fitting of meter. Note that the Restrictor FlowElement (RFE) is connected to the inlet fitting.Care

12The calibration can then be corrected to the appropriate gas desired based onrelative correction [K] factors shown in the gas factor table - see App

7.2 Calibration of GFM Mass Flow MetersAll adjustments in this section are made from the outside of the meter, there is noneed to disassemble any pa

14See also section 8. TROUBLESHOOTING. If after attempting to remedy theabove conditions, a malfunction still persists, return the meter for factory

7.3.4 10% Flow AdjustmentUsing the flow regulator, adjust the flow rate to 10% of full scale flow according to thecalibrator. Check the flow rate ind

 CAUTION:This product is not intended to be used in life support applications!

167.4.1 Access LCD Display CircuitCarefully remove the LCD from the GFM or panel mounted surface. Remove thealuminum housing on the side of the connec

178.2 Troubleshooting GuideINDICATIONlack of reading or outputunstable or no zero readingfull scale output at “noflow” condition or withvalve closed c

18INDICATIONNo zero reading after 15minute warm up time and noflow condition.No zero reading after 15minute warm up time and noflow condition. Display

19INDICATIONLCD Display reading doesnot correspond the correctflow range according analogoutput 0-5 Vdc signal. LCD Display reading and analog output

20INDICATIONLCD Display reading isabove maximum flow rangeand output voltage 0-5 Vdcsignal is more than 5.5 Vdcwhen gas flows through theGFM. Gas flow

21INDICATIONGFM is disconnected fromthe source of the gas (noflow conditions) but LCDDisplay reading is fluctuating in wide range.Output voltage 0-5 V

QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccmwhere K = relative K factor to reference gas (oxygen to nitrogen)1d X Cpwhere d = gas densit

23APPENDIX 1COMPONENTS DIAGRAMGFM METERING PC BOARD

24APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that

ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Deuterium D21.00 1.722 1.799Diborane B2H6.4357 .508 1.235Dibromodifluoromethane CBr2F2.1947 .15 9

TABLE OF CONTENTS1. UNPACKING THE GFM MASS FLOW METER...1.1 Inspect Package for External Damage...

26ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Hydrogen Bromide HBr1.000 .0861 3.610Hydrogen Chloride HCl1.000 .1912 1.627Hydrogen Cyanide HCN

27ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Phosphorous Oxychloride POCl3.36 .1324 6.843Phosphorous Pentafluoride PH5.3021 .1610 5.620Phosp

28APPENDIX 3DIMENSIONAL DRAWINGSFLOW2.380.95FG6-32HABCC***EDEDNO LCDVERSIONDASHED LINE FORHIGH FLOW UNITSNOTES: Aalborg7 reserves the right to chang

29PARTS OF THE FLOW METERLEFT AND RIGHT VIEWSFRONT VIEW

30APPENDIX 4NOTE: Follow Return Procedures In Section 1.3.WARRANTYAalborg7 Mass Flow Systems are warranted against parts and workmanship for a period

TRADEMARKSAalborg®-is a registered trademark of Aalborg Instruments & Controls. Buna®-is a registered trademark of DuPont Dow Elastometers.Kalrez®

7.3.6 50% Flow Adjustment...7.3.7 75% Flow Adjustment...

1. UNPACKING THE GFM MASS FLOW METER1.1 Inspect Package for External DamageYour GFM Mass Flow Meter was carefully packed in a sturdy cardboard carton,

2CAUTION: IT IS THE USERS RESPONSIBILITY TO DETERMINE IF THEINSTRUMENT IS APPROPRIATE FOR THEIR OXYGEN APPLICATION, AND FORSPECIFYING O2 CLEANING SERV

3Based on the GFM transducer’s serial number it may require a different powersup-ply voltage. GFM flow meters with serial numbers below 340621-1 mayre

4IMPORTANT NOTES:In general, “D” Connector numbering patterns are standardized. There are, how-ever, some connectors with nonconforming patterns and t

FIGURE 2.b - CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING.3. PRINCIPLE OF OPERATIONThe stream of gas entering the Mass Flow transducer is split by shuntin